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Model No.
Gas
Range
 Qty. 　
Aera FC-7700CD 0.5%PH3/H2 5SLM 4  
Aera FC-7700CD 0.5%PH3/SIH4 500SCCM 20
Aera FC-7700CD 5% PH3/H2 2SLM 1
Aera FC-7700CD ARGON 300SCCM 1
Aera FC-7700CD ARGON 500SCCM 14
Aera FC-7700CD H2 3SLM 1
Aera FC-7700CD H2 3SLM 1
Aera FC-7700CD HE 500SCCM 1
Aera FC-7700CD SIH4 800SCCM 1
Aera FC-7700CU NH3 2SLM 1
Aera FC-7710CD C2 15SLM 1
Aera FC-7710CD N2O 20SLM 2
Aera FC-7710CD N2O 8SLM 3  
Aera FC-7710CD O2 15SLM 2  
Aera FC-7710CD SIH4 4SLM 3  
Aera FC-7800CD 10%AR/NF3 2000SCCM 2  
Aera FC-7800CD 5%B2H6/H2 2SLM 1  
Aera FC-7800CD 5%PH3/N2 2SLM 1  
Aera FC-7800CD 5%PH3/N2 2SLM 2  
Aera FC-7800CD ARGON 2SLM 2  
Aera FC-7800CD ARGON 500SCCM 7  
Aera FC-7800CD CH3SIH3 550SCCM 1  
Aera FC-7800CD H2 2SLM 6  
Aera FC-7800CD N2 2000SCCM 1  
Aera FC-7800CD N2O 1.5SLM 1  
Aera FC-7800CD N2O 1000SCCM 2  
Aera FC-7800CD NF3 1SLM 6  
Aera FC-7800CD NH3 2.5SLM 3  
Aera FC-7800CD O2 2000SCCM 3  
Aera FC-7800CD O2 10SCCM 3  
Aera FC-7800CD O2 500SCCM 3  
Aera FC-7800CD SIF4 2SLM 1  
Aera FC-7800CD SIF4 2000SCCM 2  
Aera FC-7800CD SIF4 200SCCM 3  
Aera FC-7800CD SIH4 1.5SLM 1  
Aera FC-7800CD SIH4 5SCCM 1  
Aera FC-7800CD SIH4 1000SCCM 2  
Aera FC-7800CD SIH4 100SCCM 2  
Aera FC-7800CD SIH4 2000SCCM 2  
Aera FC-7800CD SIH4 200SCCM 5  
Aera FC-7800CD WF6 500SCCM 1  
Aera FC-7800CD WF6 750SCCM 4  
Aera FC-7800CU ARGON 500SCCM 8  
Aera FC-7800CU WF6 500SCCM 1  
Aera FC-780C SIH4 1SLM 2  
Aera FC-7810CD 5%B2H6/N2 10SLM 1  
Aera FC-7810CD C2H6 5000SCCM 2  
Aera FC-7810CD CO2 15000SCCM 1  
Aera FC-7810CD HE 10SLM 1  
Aera FC-7810CD HE 20SLM 1  
Aera FC-7810CD HE 10000SCCM 3  
Aera FC-7810CD HE 10SLM 4  
Aera FC-7810CD N2O 20SLM 1  
Aera FC-7810CD N2O 2SLM 1  
Aera FC-7810CD N2O 20000SCCM 2  
Aera FC-7810CD NF3 5SLM 1  
Aera FC-7810CD NF3 3SLM 4  
Aera FC-7810CD NF6 4000SCCM 8  
Aera FC-7810CD NH3 10SLM 2  
Aera FC-7810CD NH3 20000SCCM 2  
Aera FC-7810CD O2 1.5SLM 1  
Aera FC-7810CD O2 20000SCCM 5  
Aera FC-7810DC N2 30SLM 1  
Aera FC-7810DC SIF4 4SLM 1  
Aera FC-785C H2 500SCCM 3  
Aera FC-786C N2 10SLM 1  
Aera FC-980 ARGON 1SLM 1  
Aera FC-980 SF6 50SCCM 1  
Aera FC-980 SF6 50SCCM 2  
Aera FC-980B N2 1SLM 1  
Aera FC-980C N2 300SCCM 1  
Aera FC-980C N2 500SCCM 1  
Aera FC-980C O2 100SCCM 1  
Aera FC-981 N2 10SLM 1  
Aera FC-981B N2 10SLM 1  
Aera FC-981B N2 20SLM 1  
Aera FC-D980C ARGON 500SCCM 2  
Aera FC-D980C C2F6 30SLM 2  
Aera FC-D980C C2F6 50SCCM 4  
Aera FC-D980C C4F8 20SCCM 1  
Aera FC-D980C CH3F 9SCCM 8  
Aera FC-D980C N2 500SCCM 20  
Aera FC-D980C N2O 2SLM 1  
Aera FC-D980C NF3 30SCCM 6  
Aera FC-D980C O2 1SLM 1  
Aera FC-D980C O2 2SLM 1  
Aera FC-D980C O2 100SCCM 2  
Aera FC-D980C O2 20SCCM 4  
Aera FC-D980C SIH4 200SCCM 2  
Aera FC-D980CBM N2 100SCCM 2  
Aera FC-D981C WF6 1200SCCM 1  
Aera FC-D981CBM N2 20SLM 2  
Aera FC-D982C ARGON 50SLM 1  
Aera FC-D986CT-6BMA N2 50SLM 2  
Aera FC-PA980C N2 5SLM 2  
Aera FM-3700D N2 3SLM 1  
Aera FM-860 N2 2SLM 1  
Aera FM-860 SIH4 1SLM 2  
Aera FM-861 N2O 10SLM 2  
Aera FM-8700D ARGON 1SLM 2  
Aera FM-D861-6BM N2 50SLM 2  
Aera TCFC-980CB SIH4 2000SCCM 2  
Aera TCFC-D980C H2 2SLM 1  
Aera TCFC-D980C HE 500SCCM 1  
Aera TCFC-D980C N2 5SLM 4  
Aera TCFC-D980C N2O 1SLM 2  
Aera TCFC-D980C O2 500SCCM 3  
Aera TCFC-D980C SIH4 1SLM 4  
Aera TCFC-D981SBC C2F6 5000SCCM 3  
Aera TCFC-D981SBC HE 10SLM 2  
Aera TCFC-D981SBC N2 10SLM 4  
Aera TCFC-D981SBC N2O 20SLM 3  
Aera TCFC-D981SBC NH3 10SLM 4  
Aera TCFC-D981SBC O2 20SLM 4  
　 　 　 　 　
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