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AG4100S备件汇总表

控制类  机械手  电气类  阀门类  仪表类  石英类  O-RING  传感器类  MFC
设备型号 系统分类 产品序号 产品描述
AG4100S 控制类 7100-5667-01 PCA, Advanced Temperature Processor
7100-5222-05 PCA, Single Support
7100-5168-07 PCA, RMS Analog Board
7100-5123-03 PCA, 12-Bit AID, Modified
7100-5667-01 PCA, Advanced Temperature Processor
7100-5192-01 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-5192-03 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-5192-02 PCA, STD MIO-24, 24-Channel Relay Intfc
7100-3387-01 PCA, Floppy Disk Controller
7100-5190-01 PCA, SB8240 Dual Serial Interface
7100-5190-02 PCA, Dual Serial Interface
7100-5194-01 PCA, System Timing and Counting
7100-5193-01 PCA, D/A Board
7100-5193-02 PCA, D/A Board
7100-5188-xx PCA, 20-Bit Addressable Memory
7100-5133-04 PCA, CPU Board
7100-5190-03 Dual Serial Interface(for Wafer Aligner option)
7100-5124 Communications Board (SECS)(for E-SECS option)
7100-5125 PCA, SECS RS-232 Interface Adapter(for E-SECS option)
7100-5189-02 PCA, 3-Cassette Interface(for 3-Cassette option)
2100-0121 PCA, MIO-24 Relay Interface #4(for 3-Cassette Option)
7100-5146-02 Six-Gas Interlock Board,4100S
7100-5080-02 PCA. Oven Control Board
7100-1079-04 Control Select Module, Dual Control
7100-1079-03 Control Select Module, Single Control
机械手 7100-0580-04 End Effector Assembly,Plunger
7100-3552-01 Robot Support Assembly
7100-4166-01 Robot System,Equipe ATM-100
4100-0039-04 Robot, EquipeATM-100
7100-1535-03 End Effector Assembly, Slip-Free
7100-4127-01 End Effector Assembly, 5-6 Inch,Polysilicon Autoloader
7100-0577-05 Cooling Station Assembly
7100-0813-01 Motion Control Assembly
4100-0068-01 Controller Assembly, Equipe ATM- 100
7300-0807-05 Mounting Bracket, Robot Controller
7100-0700-05 Cable, Communications, Robot
6001-1030-03 Cable, Power, Controller-to-Robot
7100-0695-02 Cable, Power, Robot Controller
6001-1029-03 Cable, Signal, Controller-to-Robot
7100-1501-02 Cassette Assembly, Stationary, Receive
7100-1486-04 Cassette Assembly, Swivel, Receive
7100-1487-03 Cassette Assembly, Stationary, Send
7100-1485-04 Cassette Assembly, Swivel, Send
7100-2904-02 Swivel Mechanism Assembly
7100-1057-02 Susceptor Station Assembly,3-and 4-Inch
7450-0039-01 GaAs Susceptor,Autoloader,3"
7450-0039-02 GaAs Susceptor,Autoloader,4"
7450-0040-01 Cover,GaAs Susceptor,Autoloader,3"&4"
7400-0104-02 Tray,GaAs Susceptor,3"and 4"
7100-4194-01 Susceptor Station Assembly,4-Inch
7100-4191-01 Susceptor Station Assembly,6-Inch
4900-0006-01 Non-Contact Wafer Aligner Replacement Parts
电气类 7100-0726-01 Light Assembly
7100-4053-01 Chiller Transformer Assembly,4100S
7100-0058-02 Vacuum Pump Assembly
7100-3764-03 Chiller Assembly,Non-CFC,60Hz
7100-3764-02 Chiller Assembly,Non-CFC,50Hz
7100-3466-01 Assembly,Vacuum Display Panel Meter
7100-3453-01 Indicator Light Assembly
7100-3580-01 Exhaust Panel Assembly,Warm Gray
7100-3435-01 Filter and Blower Assembly
7100-0585-02 Power Filter Assembly,200/208VAC
7100-0589-02 Power Filter Assembly,380/415VAC
7100-2263-04 Assembly,Rear,EMO,Warm Gray
2451-0010-02 Lamp, 1200 Watts, 208 Volts
2109-0050 Lampholder, Tungsten-Halogen, 10A, 600V
7100-0039-03 Triac Assembly,4100S,200/208VAC
7100-0039-04 Triac Assembly,4100S,380/415VAC
7100-0565-12 Relay Panel Assembly
7100-0563-07 AC Power Module,200/208 VAC,5-Wire
7100-0563-08 AC Power Module,380/415 VAC,5-Wire
7100-1733-03 AC Power Module,200 VAC,4-Wire
7100-3441-01 Double O-Ring Chassis Assembly
7100-1323-01 Power Supply Assembly
7100-1344-01 Power Supply to Frame Assembly
7100-1339-01 Power Supply and Harness Assembly
7100-1270-01 Vacuum Pump Assembly,115V,50/60Hz
7100-1602-01 Vacuum Pump Assembly,220V,50/60Hz
阀门类 4502-9066-01 Valve, Check, Pneumatic, 114NPT, 1 PSI
4502-9061-01 Valve, Needle, Manual, N.C., 2-Way, M, 1/2
4502-0176-01 Valve, Needle, 90D, .5T x.5T
4502-0059-01 Valve, Relief, Adjustable, 1/4 Swagelock
4502-9063-01 Valve, Diaphragm, Solenoid, N.C., 2W, F, 1/2
4502-9065-01 Valve, Check, 2-Way, Male, 1/4NPT, 1 PSI
4502-0301-01 Speed Controller
5103-9036-01 Switch, Pressure, 1/8 NPT, Adjustable
4502-0062-01 Pressure Reg., Manifold Mount, 1-100 PSI
4502-9060-01 Valve, Ball, Manual, N.C., 3-Way, M, 1/2
7310-0888-01 Handle, 3-Way Valve
7310-0889-01 Extension, 3-Way Valve
7310-0899-02 Bracket, 3-Way Valve
4502-0041-01 Valve, Solenoid, Normally-Closed, 4-Way
4502-9041-01 Valve, Manual, 1/4 Turn, Diaphragm
4502-9027-01 Valve, Dual-Diaphragm,3-Way,V-Block,Pneumatic
4502-9043-01 Valve, Diaphragm, Normally-Closed
4502-9042-01 Valve, Diaphragm, Normally-Open
2200-0053-01 Pressure Regulator Male-VCR
2706-0011-02 Filter, In-line, Gas, .01 Micron
4502-0173-01 Check Valve. Male. VCR. 2 PSI
仪表类 2908-0060-01 Meter, Water Flow w/ Switch, 3-6 GPM
2900-0035-01 Gauge, Pressure, 0-100 PSI, 1/8 NPT
2900-0035-02 Gauge, Pressure, 0-60 PSI, 1/8 NPT
2900-0035-03 Gauge, Pressure, 0-160 PSI, 1/8NPT
7100-1626-08 6-Line Gas Panel  Assembly,Clean
7100-3528-03 6-Line Gas Panel  Assembly,Clean
2900-0039-01 Pressure Gauge ,Mech.w/Fixed Male VCR
7100-1729-04 4-Line Gas Panel  Assembly,Clean
7100-3531-03 4-Line Gas Panel  Sub-Assembly
7100-1727-08 3-Line w/Purge Gas Panel  Assembly,Clean
7100-3530-06 3-Line w/Purge Gas Panel  Sub-Assembly
7100-1727-06 3-Line Gas Panel  Assembly,Clean
7100-3530-05 3-Line Gas Panel  Sub-Assembly
7100-1725-08 2-Line w/Purge Gas Panel  Assembly,Clean
7100-3529-06 2-Line w/Purge Gas Panel  Sub-Assembly
7100-1725-06 2-Line Gas Panel  Assembly,Clean
7100-1725-05 2-Line Gas Panel  Sub-Assembly
5300-0091-01 Thermostat, 150℉, Open
7100-4227-03 Extended Range Pyrometer,Hi Gain
6017-0003-02 Thermocouple Type K, ETC
7100-5623-02 Dual Color Pyrometer Gauge Assembly
7100-1134-07 Dual Color Pyrometer,Optical Assembly,6"
石英类 7400-0060-01 Quartz Wafer Tray, 4", Standard
7400-0060-02 Quartz Wafer Tray, 5", Standard
7400-0111-01 Quartz Wafer Tray, 6", Standard
7400-0085-07 Quartz Wafer Tray, 4", Slip-Free