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设备型号 |
系统分类 |
产品序号 |
产品描述 |
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AURA1000主要备件表 |
控制类 |
90-1036-01 |
PCB, MFM/MFC, INTBRFACE BD |
|
A38-015-01 |
SWITCH VACUUM |
|
94-0114-01 |
CONTROLLER,PRESS,VACUUM |
|
34-5034-01 |
JUMPER,TERMINAL BOARD,#6 |
|
A90-005-02 |
PCA,CONTROLLER BD,PICK & PLACE W/SeCS II |
|
A89-005-01 |
PCB, CONTROLLER BOARD |
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A90-003-01 |
ASSY PCA INTERLOCK |
|
A89-003-01 |
PCB,AVRAINTERLOCK REV.E |
|
A95-030-01 |
ASSY，AURA，DISPLAY，
PANEL |
|
A90-003-01 |
Assy, Interlock Board |
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|
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机械手 |
A95-006-01 |
EOP WITH HOUSING |
|
A95-036-01 |
PROCESS CHAMDER,NEW CHUCK,MECH |
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A01-007-01 |
COVER.TOP,PROCESS chamber |
|
A01-010-01 |
RING,WINDOWMTG |
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A01-012-01 |
COVER,BOTTOM PROCESS CHAMBER |
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A01-073-01 |
CHAMBER,PROCESS |
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A95-436-01 |
ASSY,AURA,PROCESS CHAMBER,NEW CHUCK,MECH |
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A02-064-01 |
FLAG, ARM ASSY |
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A02-088-Q3 |
PLATE,LEFT |
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A02-087-01 |
SUPPORT,CRUCK,SEND |
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A02-086-01 |
SUPPORT,CHUCK |
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A02-066-01 |
FLAG,ARM OUT,RIGHT |
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A02-068-02 |
FLAG,AAM OUT,LEFT |
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A02-069-0l |
FLAG, ARMS HOME |
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A02-085-01 |
PLATE,STOP |
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A02-084-01 |
Bracket, Rear Support 6" |
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A02-084-02 |
Bracket, Rear Support 5" |
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A02-084-03 |
Bracket, Rear Support 4" |
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A02-084-04 |
Bracket, Rear Support 3" |
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A98-015-01 |
SEND/RECEIVE ELEVATOR |
|
|
|
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电气类 |
A99-011-01 |
PLASMA DETECT/LAMP TOP |
|
A95-201-01 |
HINGED PANEL ASSY 50/60HZ PLASMA DETECT/LAMP |
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A95-072-01 |
ASSY,STRIPPBR,LAMP TRAY |
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A02-160-01 |
CHASIS,LAMP,TRAY.RSV.A |
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A95-013-03 |
MACNETRON/WAVGUIDE,PLASMA DETECT |
|
A95-202-01 |
PLASMA DETECT/LAMP FAIL 60HZ, ASSY - AURA |
|
A97-007-04 |
KIT,AURA,PLASMA DETECT |
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A90-031-01 |
PCA,AURA,FAILURE DETECT.60HZ |
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A39-001-01 |
Lamp, 1000W, 120VAC |
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A39-006-01 |
Lamp, 1000W, 225VAC |
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|
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O-RING |
A78-005-01 |
O-RING,SILICONE |
|
A78-006-01 |
O-RING,SILICONE |
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A78-007-01 |
O-RING,SILICONE |
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A78-008-01 |
O-RING,SILICONE |
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A78-034-01 |
O-RING, 9-120 |
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A78-014-01 |
O-RING,2-12311 ,174 ID x .103 C/S)SIIICONE |
|
A78-005-01 |
O-Ring, Silicone, Chamber, Upper, Inner |
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A78-006-01 |
O-Ring, Silicone, Chamber, Upper, Outer |
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A78-007-01 |
O-Ring, Silicone, Chamber, Bottom, Cover Plate |
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A78-008-01 |
O-Ring, Silicone, Chamber, Bottom, Quartz |
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A78-009-01 |
O-Ring, Silicone, Chamber, Door |
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A78-014-01 |
O-Ring, Silicone, EOP, Outer |
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A78-016-01 |
O-Ring, Silicone, EOP, Inner |
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A78-021-01 |
O-Ring, Silicone, Atmosphere Switch |
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A78-022-01 |
O-Ring. Viton. U-Torr |
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A78-029-01 |
0-Ring, Silicone, Teflon Coated (SS Vale) |
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A78-024-01 |
O-Ring, 014 (.489 ID X.070 CIS) Conductive |
|
A78-029-01 |
O-Ring, 2-213 (.921 ID X.139 C/S) Silicone,Teflon Encapsulated |
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A78-030-01 |
O-Ring, 2-223 (1.609 ID X .139 C/S) Silicone,Teflon Encapsulated |
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|
|
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传感器类 |
A95-041-0l |
SENSOR. ASST, LOAD |
|
A90-004-02 |
PCB ASSY, OPTICAL INTERRUP SENSOR |
|
A97-048-04 |
KIT, AURA,P&P WAFER HANDLING MECH W/NITRIDE SENSOR |
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A01-376-01 |
COVER,RELAY/LAMB SENSORS |
|
23-0046-01 |
SENSOR,PRESSURE |
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A94-016-03 |
ASSY,ELEVATOR, RECEIVE,P & P W/NITRIDE OPT SENSOR |
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A94-016-04 |
ASSY,ELEVATOR,SEND,P & P W/NITRIDE OPT |
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A95-041-01 |
ASSY,AURA,SENSOR, LOAD,SHORT |
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A95-041-01 |
ASSY,AURA,SENSOR, UNLOAD,SHORT |
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A02-071-01 |
MOUNT, SENSOR, ARM OUT |
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A90-039-01 |
PCA,AURA,LAMP CURRENT SENSOR |
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A89-O39-Ol |
PCB,LAMP CURRENT SENSOR |
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A35-439-01 |
SENSOR.DIOITAL CORRENT,CSCA IBC |
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A90-004-01 |
Assy. Optical Interrupt Sensor |
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|
|
|
MFC |
A23-001-01 |
Mass Plow Controller, 02, 0-10 SLPM |
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|
|
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石英类 |
A06-012-01 |
QUARTZ,DIFFUSION DISK |
|
A97-021-03 |
AURA. WAFER SIZE 3 INCH |
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A97-021-04 |
AURA. WAFER SIZE 4 INCH |
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A97-021-05 |
AURA. WAFER SIZE 5 INCH |
|
A01-071-01 |
PIN WAFER SUPPORT |
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A06-010-01 |
TUBE, PLASMA, QUARTZ |
|
A05-020-02 |
ADAPTER TUBE MODIFICATION |
|
A01-071-01 |
Pin, Wafer Support |
|
A01-071-02 |
Pin, Wafer Support, Short |
|
A17-001-01 |
Tube, Plasma, Quartz |
|
|
|
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阀门类 |
22-0201-02 |
VALVE,THROTTLE,35MM. 2-WAY |
|
A34-035-01 |
SCREWLOCK, FEMALE W/NUT |
|
22-0303-03 |
EA VALVE,SOLENOID,3-NAY 1/16 ORIFICE |
|
20-0185-01 |
FTG,ADAPTER.#10-32 TO 1/8PT |
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21-0019-01 |
REGULATOR,0-100 PSI |
|
A22-010-03 |
VALVE,SOLENOID,3 WAY |
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A22-005-01 |
EA SOLENOID,4-WAY DOUBLE MINATURE |
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A22-006-01 |
EA SOLENOID,3-WAY MINATURE |
|
22-0303-03 |
Valve, Solenoid 3-Way (Pneumatic Enable) |
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A22-003-02 |
Valve, Pneumatic, NuPro |
|
A22-010-03 |
Valve, Solenoid, 3-Way |
|
A22-024-01 |
Valve, Vacuum, NW16, Chemraz 515 O-Ring |
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A22-025-01 |
Valve Vacuum NW40,,hemraz 515 O-Ring |
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|
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其它 |
A95-002-02 |
ASSY,AURA,PCB MTG,SHIELD,PICK & PLACE |
|
A02-091-01 |
PLATE,MOUNTING ELEV.NEW CHUCK MECH |
|
A97-020-01 |
KIT,AURA,DOOR, MECHANISM,NEW CHUCK MECH, |
|
34-5127-03 |
PIN HEADER,6 PIN MR PCH |
|
A95-004-01 |
ASSY.FUSE BOX |
|
A95-023-03 |
TITLE: ASSY, PNEUMATIC PANEL,L. H.STD |
|
A97-024-01 |
CONSUMMABLES SPARES KIT - 50/6 |
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