|
设备型号 |
系统分类 |
产品序号 |
产品描述 |
|
MATRIX105主要备件表 |
控制类 |
1000-0003 |
PCB,Transport Control |
|
1000-0019 |
PCB,Transport |
|
1000-0041 |
PCB,process assenbly |
|
1000-0042 |
PCB,operator interface |
|
1000-0049 |
PCB,process interface |
|
AW-ETCH-105-002 |
control board |
|
1000-0050 |
PCB,controller |
|
|
|
|
机械手 |
0101-0501 |
Chuck Assembly |
|
0992-40287 |
CHUCK, WAFER W/ REMOVABLE |
|
0992-60103 |
IHSULATOR,WAFER CHUCK |
|
0993-20145 |
PLATE, CASSETTE ADJUST |
|
0993-20146 |
PLATE, CASSETTE GUIDE |
|
|
|
|
电气类 |
0101-0351 |
Orlbitran Motor Assembly |
|
0101-0401 |
Endpoint Detector Assembly |
|
0990-95010 |
Lamp, Pushbutton Switch |
|
0995-99739 |
THERMOSTAT,DIFFERENTIAL |
|
0101-0510 |
ASSEMBLY, RF FILTER BOX |
|
0990-95007 |
SWITCH,MUSHROOM EMO WITH |
|
|
|
|
O-RING |
0994-60005 |
O-ring,Chamber Door |
|
0994-60006 |
O-ring,Chamber Base |
|
0994-60007 |
O-ring,Chamber Quartz |
|
0994-60017 |
O-ring,Chamber Top |
|
0994-60029 |
O-ring,Vac Valve |
|
0994-60050 |
O-rlpg,Silicone Chuck |
|
0994-60055 |
O-ring,Macor seal |
|
0994-60062 |
O-ring,kal-Rez Bellows |
|
0994-60063 |
O-ring,kal-Rez chuck |
|
0994-60005 |
O-RING,DOOR RED SILICONE |
|
0994-60006 |
O-RING, ANODIZED CHIfMBER |
|
0994-60007 |
O-RING,QUARTZ CHAMBER RED |
|
0994-60019 |
O-RING,VACUUM VALVE |
|
9994-60050 |
O-RING,CHUCK SEAL |
|
0994-60055 |
O-RING,P-7 WHITE SILICON |
|
0994-60062 |
O-RING, KALREZ, |
|
0994-50063 |
O-RING, KALREZ, |
|
0994-60086 |
D-RING, BELLOWS HOUSING CAP |
|
|
|
|
传感器类 |
0990-53005 |
Sensor Orbitran Unit |
|
0995-99722 |
SENSQR TEMPERATURE |
|
0995-10006 |
SENSOR. HALL EFFECT |
|
|
|
|
MFC |
0995-10543 |
MFC 02 5SLM TYLAN FC280-S |
|
0995-10544 |
MFC 02 300SLM TYLAN |
|
|
|
|
石英陶瓷类 |
0992-60092 |
Locator Pins |
|
0992-60094 |
Ceramic Ring |
|
0992-60126 |
Insulator, Lower React.(Macor) |
|
0992-60147 |
Chamber |
|
0992-60148 |
Baffle, Qtz. Insulated Reactor |
|
0992-40266 |
CHAMBER. 6" INSULATED |
|
0992-40286 |
RING QUARTZ BAFFLE MTG |
|
0992-60147 |
CHAMBER QUARTZ W/DIFFUSER |
|
0992-60148 |
BAFFLE QUARTZ, 1/2" HOLES |
|
|
|
|
阀门类 |
0995-16510 |
Clippard Valve ET-3 |
|
0995-16512 |
Bleed vavle |
|
0995-16527 |
vavle gas |
|
0995-16509 |
VALVE. SOLENOID |
|
0990-94012 |
FLOW SWITCH. RYTON .1O |
|
0995-16512 |
VALVEINLINE N2 |
|
0995-16527 |
VALVE 24V 060 ORIFICE |
|
0995-16521 |
VALVE,CLIPPARD 24V LP |
|
0995-99742 |
VAVLE,NEEDLE |
|
0995-16510 |
VALVE,24V |
|
0995-16519 |
VALVE,RTGHT ANGLE ISO NL |
|
0995-16521 |
VALVE, CLIPPARD 24V LP |
|
0995-99702 |
VALVE,NEEDLE |
|
0995-99712 |
VACuum VALVE ,pressure |
|
|
|
|
仪表类 |
0995-99754 |
GAUGE, PRESSURE 30 PSIG |
|
0995-99755 |
GAUGE, PRESSURE 100 PSIG |
|
0995-99772 |
GAUGE, 0-60 PSIG SS |
|
|
|
|
其它 |
0995-99733 |
Temp. Controller Mod. |
|
0990-99002 |
FILTER 1OA |
|
0990-99006 |
FILTER 5A 125 VAC |
|
0993-00152 |
ENCLOSURE RF FILTERS |
|
0990-67136 |
EPROM SET, VERSION 4.03 |
|
0990-62002 |
I.C., EPROM 2764A |
|
0990-62005 |
I.C., EPROM 27128A |
|
0990-62007 |
I.C., EPROM 2864A |
|
0993-10019 |
LABEL, MACHINE CONSTANTS |
|
0996-00042 |
SOFTWARE IMAGE. 4.03 |
|
