|
设备型号 |
系统分类 |
产品序号 |
产品描述 |
|
Tegal 90X |
控制类 |
DS 1009-04 |
PRODUCT STRUCTURE, MICRO-P, 9XX |
|
|
|
CD 1009-00301 |
MICRO-P |
|
|
|
80-095-278 |
COMPONENT LOCATION |
|
|
|
80-095-278 |
MPU-MEMORY SECTION |
|
|
|
80-095-278 |
I/O SECTION |
|
|
|
80-095-278 |
A-D CONVERTER SECTION |
|
|
|
80-095-278 |
D-A CONVERTOR SECTION |
|
|
|
80-095-278 |
DIGITAL INPUT SECTION |
|
|
|
80-095-278 |
DIGITAL OUTPUT SECTION |
|
|
|
80-095-278 |
DIAGNOSTIC SECTION |
|
|
|
80-095-320 |
MAXI-PAGE MEMORY UNIT |
|
|
|
94286-001 |
EEPROM EXPANSION |
|
|
|
95-207-004 |
SCHEM, PCB,MEMORY ANDBAUD EXPANSION,MBE-4 |
|
|
|
99-247-003 |
Spatula Interface, SPI-3 |
|
|
|
99-125-008 |
Front Panel interface |
|
|
|
99-207-004 |
Memory &Baud Rate Expansion, MBE-4 |
|
|
|
DS1113-03 |
PRODUCT STRUCTURE,MATCHING NETWORK |
|
|
|
CD1151-00102 |
Endpoint Detector |
|
|
|
99-126-006 |
Gas Control Interface PCB,IGC6 |
|
|
|
|
|
|
机械手 |
CW1078-30401 |
Spatula Drive,3" |
|
|
|
31-233-006 |
Satula Drive S/A |
|
|
|
31-178-001 |
SenderlReceiver Solenoid Valve |
|
|
|
84-228-006 |
Cassette Harness |
|
|
|
CW1078-40471 |
Spatula Drive 4" |
|
|
|
CW!078-50401 |
Spatula Drive,5" |
|
|
|
CW!078-60401 |
Spatula Drive 4" |
|
|
|
CC11066-01301 |
901 e REACTION CHAMBER |
|
|
|
20-004-001 |
KET COMMON CHAMBER |
|
|
|
23-189-001 |
KET, IN-HOUSE, CHAMBER |
|
|
|
|
|
|
电气类 |
CR0024-01001 |
RF delivery |
|
|
|
93-066-003 |
RF PCB Link Cable |
|
|
|
94-215-002 |
Matching Network DC Power Harness |
|
|
|
99-173-007 |
RF Generator Interface, RFG-7 |
|
|
|
93-074-001 |
Display Interconnect Cable |
|
|
|
94-194-001 |
Display Power Harness |
|
|
|
CG1145-01103 |
Gas Delivery |
|
|
|
|
|
|
O-RING |
80-202-154 |
0-RING, WON 1/4/D 3/32W D70 |
|
|
|
80-202-189 |
0-RING, VITON 7-1/4ID 1/8W D70 |
|
|
|
80-202-190 |
0-RING, VITON 10-1/2ID 3/16W D70 |
|
|
|
80-202-394 |
0-RING, CHEMRAZ3/4ID 1/8W D80 |
|
|
|
|
|
|
传感器类 |
93-087-001 |
Elevator Sensor Interconnect Cable Parts List |
|
|
|
94-228-004 |
Sensor Harness |
|
|
|
96-228-001 |
SCHEM, PCB, FLAG SENSOR |
|
|
|
|
|
|
MFC |
80-094-034 |
AR 50SCCM |
|
|
|
80-094-061 |
AR 50SCCM |
|
|
|
80-094-005 |
AR 60SCCM |
|
|
|
80-094-067 |
C2F6 15SCCM |
|
|
|
80-094-019 |
C2F6 25SCCM |
|
|
|
80-094-068 |
C2F6 40SCCM |
|
|
|
80-094-015 |
C2F6 50SCCM |
|
|
|
80-094-008 |
C2F6 100SCCM |
|
|
|
80-094-006 |
CCL3F 100SCCM |
|
|
|
80-094-O10 |
CCL3F 100SCCM |
|
|
|
80-094-035 |
CF4 25SCCM |
|
|
|
80-094-040 |
CF4 50 SCCM |
|
|
|
80-094-033 |
CF4 100SCCM |
|
|
|
80-094-018 |
CHF3 25SCCM |
|
|
|
80-094-069 |
CHF3 30SCCM |
|
|
|
80-094-025 |
CHF3 40SCCM |
|
|
|
80.094-007 |
CHF3 50SCCM |
|
|
|
80-094-056 |
CHF3 80SCCM |
|
|
|
80-094-014 |
CHF3 1OOSCCM |
|
|
|
80-094-049 |
HE 10 SCCM |
|
|
|
80-094-011 |
HE 100 SCCM |
|
|
|
80-094-009 |
HE 200 SCCM |
|
|
|
80-094-026 |
N2 15 SCCM |
|
|
|
80-094-021 |
N2 20 SCCM |
|
|
|
