| |
|
Model
No. |
Gas |
Range |
Qty. |
|
| Tylan
FC-2900MEP5 |
C2F6 |
50SCCM |
3 |
 |
| Tylan
FC-2901MEP |
ARGON |
500SCCM |
1 |
| Tylan
FC-2901MEP |
NF3 |
1SLPM |
1 |
| Tylan
FC-2901MEP |
SIH4 |
200SCCM |
1 |
| Tylan
FC-2902MEP |
C3F8 |
50SCCM |
1 |
| Tylan
FC-2902MEP-T |
CH2F2 |
50SCCM |
1 |
| Tylan
FC-2902MEP-T |
CH2F2 |
200SCCM |
2 |
| Tylan
FC-2902MEP-T |
CH3F |
500SCCM |
1 |
| Tylan
FC-2902MEP-T |
CHF3 |
200SCCM |
1 |
| Tylan
FC-2902MEP-T |
CO |
100SCCM |
1 |
| Tylan
FC-2902MEP-T |
O2 |
1000SCCM |
1 |
| Tylan
FC-2952MEP5-T |
O2 |
10SCCM |
2 |
| |
|
|
|
|
|
