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Model No.
Gas
Range
 Qty. 　
UNIT 1660 -103924 CHF3 50SCCM
2
UNIT 1660 -103928 ARGON 300SCCM
4
UNIT 1660 -104963 C4F8 50SCCM
9
UNIT 1661 -101326 N2 5SLM
1
UNIT 1661 -102649 N2O 1SLM
2
UNIT 1661 -102650 O2 20SLM
2
UNIT 1662 -100083 BF3 5SCCM
1
UNIT 1665 -100088 N2 3SLM
4
UNIT 8100 -102312 N2 1SLM
1
UNIT 8100 -102722 N2 10SLM
1
UNIT 8100 -102723 N2 5SLM
1
UNIT 8100 -102724 N2 2SLM
2
UNIT 8100 -103114 N2 20SLM
2
UNIT 8100 -103126 CH4 10SLM
1
　
UNIT 8100 -103127 NH3 5SLM
1
UNIT 8100 -103284 NH3 2SLM
1
UNIT 8160 -101591 O2 200SCCM
1
UNIT 8160 -101780 N2 5SLM
1
UNIT 8160 -101994 ARGON 500SCCM
2
UNIT 8160 -101995 NF3 1SLM
2
UNIT 8160 -101996 SIH4 200SCCM
2
UNIT 8160 -101997 50%PH3/SIH4 200SCCM
4
UNIT 8161 -100218 ARGON 7.5SLM
4
UNIT 8161 -100399 N2 10SLM
4
UNIT 8161 -100401 N2 1SLM
3
UNIT 8165 -100347 N2 50SLM
1
UNIT 8565 -100120 NH3 20SLM
1
UNIT 8565 -100359 HE 30SLM
1
UNIT UFC-1100A N2 2SLM
1
UNIT UFC-1660 N2O 20SLM
1
UNIT UFC-1660 -103924 CHF3 50SCCM
3
UNIT UFC-1660M BF3 2SCCM
12
UNIT UFC-1660M C2HF5 50SCCM
3
UNIT UFC-1660M C3H2F6 100SCCM
9
UNIT UFC-1660M C4F6 50SCCM
2
UNIT UFC-1660M HE 100SCCM
9
UNIT UFC-1661 -102646 SIF4 2SLM
2
UNIT UFC-1661M ARGON 10SLM
1
UNIT UFC-1661M C2F6 5SLM
2
UNIT UFC-1661M N2 10SLM
2
UNIT UFC-1661M N2 10SCCM
4
UNIT UFC-1661M N2 20SCCM
4
UNIT UFC-1661M N2O 20SLM
2
UNIT UFC-1661M NH3 10SLPM
1
UNIT UFC-1662M BF3 2SCCM
2
UNIT UFC-1662M BF3 2SCCM
3
UNIT UFC-1662M BF3 2SCCM
4
UNIT UFC-1662M BF3 2SCCM
5
UNIT UFC-1665M ARGON 50SCCM
1
UNIT UFC-1665M ARGON 100SCCM
2
UNIT UFC-1665M C6H18SI2O 200SCCM
2
UNIT UFC-1665M C6H18SI2O 50SCCM
2
UNIT UFC-1665M O2 5000SCCM
1
UNIT UFC-1665M O2 2SLM
2
UNIT UFC-1665M TICL4 50SCCM
1
UNIT UFC-1665M TICL4 20SCCM
2
UNIT UFC-3165 N2 100SLM
1
UNIT UFC-8100 N2 20SLM
2
UNIT UFC-8100 N2 2SLM
3
UNIT UFC-8100 N2 20SCCM
10
UNIT UFC-8160 5%PH3N2 2SLM
2
UNIT UFC-8160 ARGON 10SLM
2
UNIT UFC-8160 ARGON 1SLM
2
UNIT UFC-8160 ARGON 2SLM
2
UNIT UFC-8160 ARGON 20SLM
4
UNIT UFC-8160 C2F6 2SLM
2
UNIT UFC-8160 H2 20SLM
4
UNIT UFC-8160 N2 200CC
1
UNIT UFC-8160 N2 50SCCM
1
UNIT UFC-8160 N2 100SCCM
2
UNIT UFC-8160 N2O 1SLM
1
UNIT UFC-8160 NH3 200CC
1
UNIT UFC-8160 O2 2SLM
2
UNIT UFC-8160 SIH4 50.00CC
2
UNIT UFC-8160 WF6 500.00CC
2
UNIT UFC-8160M H2 2SLM
2
UNIT UFC-8160M HE 500SCCM
2
UNIT UFC-8160M O2 1SLM
2
UNIT UFC-8161 -100400 N2 20SLM
1
UNIT UFC-8161 -100402 N2 5SLM
3
UNIT UFC-8161M 5%B2 + 16/AR 400SCCM
2
UNIT UFC-8161M ARGON 1SLM
35
UNIT UFC-8161M C4F8 20SCCM
1
UNIT UFC-8161M C4F8 20SCCM
37
UNIT UFC-8161M CF4 100SCCM
39
UNIT UFC-8161M H2 2SLM
2
UNIT UFC-8161M H2 4SLM
2
UNIT UFC-8161M NF3 400SCCM
2
UNIT UFC-8161M SIH4 75SCCM
2
UNIT UFC-8161M WF6 75SCCM
1
UNIT UFC-8161M WF6 500SCCM
2
UNIT UFC-8165M HE 20SLM
1
UNIT UFC-8165M HE 50SLM
1
UNIT UFC-8561 HE 15SLM
1
UNIT UFC-8561 N2 25SLM
1
UNIT UFC-8561 N2O 15SLM
1
UNIT UFC-8564 PH3 200SCCM
2
UNIT UFM-3165 N2 50SLM
2
UNIT UPC-8130 HE 50SCCM
6
　 　 　

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